The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2020
Filed:
Mar. 29, 2018
Ebara Corporation, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
A vacuum suction pad capable of making it more difficult to separate a substrate when the substrate is held by vacuum suction, the vacuum suction padincluding: a pad main bodyhaving a lower surface adhered to a stageof a substrate holder; and a plurality of circular arc-shaped substrate holding convexities, provided on a top surface of the pad main body, for holding a substrate W attracted by vacuum suction to the top surface of the pad main body, wherein the substrate holding convexitiesare arranged concentrically with the circular pad main body, and width Win a radial direction of the substrate holding convexitylocated on a radially outer side among the plurality of substrate holding convexitiesis narrower than width Win the radial direction of the substrate holding convexityon a radially inner side.