The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2020
Filed:
Jul. 29, 2016
Applicant:
Idemitsu Kosan Co., Ltd., Tokyo, JP;
Inventors:
Kazuyoshi Inoue, Sodegaura, JP;
Futoshi Utsuno, Sodegaura, JP;
Yuki Tsuruma, Sodegaura, JP;
Shigekazu Tomai, Sodegaura, JP;
Kazuaki Ebata, Sodegaura, JP;
Assignee:
IDEMITSU KOSAN CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/786 (2006.01); C01G 15/00 (2006.01); H01L 21/02 (2006.01); C23C 14/08 (2006.01); C23C 14/34 (2006.01); C23C 14/58 (2006.01); C30B 1/02 (2006.01); C30B 29/16 (2006.01); H01L 29/04 (2006.01); H01L 29/24 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7869 (2013.01); C01G 15/00 (2013.01); C23C 14/08 (2013.01); C23C 14/086 (2013.01); C23C 14/34 (2013.01); C23C 14/5806 (2013.01); C30B 1/023 (2013.01); C30B 29/16 (2013.01); H01L 21/02565 (2013.01); H01L 21/02592 (2013.01); H01L 21/02595 (2013.01); H01L 21/02631 (2013.01); H01L 21/02667 (2013.01); H01L 29/04 (2013.01); H01L 29/24 (2013.01); H01L 29/66969 (2013.01); C01P 2002/54 (2013.01); C01P 2002/70 (2013.01); C01P 2004/61 (2013.01); C01P 2006/40 (2013.01);
Abstract
A crystalline oxide semiconductor thin film that is composed mainly of indium oxide and comprises surface crystal grains having a single crystal orientation.