The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2020
Filed:
Aug. 22, 2018
Applicant:
Globalfoundries Inc., Grand Cayman, KY;
Assignee:
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 21/8238 (2006.01); H01L 29/10 (2006.01); H01L 21/8234 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66545 (2013.01); H01L 21/82345 (2013.01); H01L 21/823431 (2013.01); H01L 21/823842 (2013.01); H01L 29/1054 (2013.01); H01L 29/66795 (2013.01); H01L 29/7848 (2013.01);
Abstract
The present disclosure relates to semiconductor structures and, more particularly, to replacement metal gate structures with reduced shorting and uniform chamfering, and methods of manufacture. The structure includes: a long channel device composed of a conductive gate material with a capping layer over the conductive gate material and extending to sides of the conductive gate material; and a short channel device composed of the conductive gate material and the capping layer over the conductive gate material.