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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10636623 B1

PDFFull Text
Date of Patent:
Apr. 28, 2020

Filed:

Jun. 12, 2019

Ion beam device

Applicant:

Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;

Inventors:

Hiroyasu Shichi, Tokyo, JP;

Shinichi Matsubara, Tokyo, JP;

Yoshimi Kawanami, Tokyo, JP;

Hiroyuki Muto, Tokyo, JP;

Assignee:

Hitachi High-Technologies Corporation, Tokyo, JP;

Attorney:

Crowell & Moring LLP

Primary Examiner:

Wyatt A Stoffa

Int. Cl.
CPC ...
H01J 37/08 (2006.01); H01J 37/28 (2006.01); H01J 37/18 (2006.01); H01J 27/26 (2006.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); H01J 37/08 (2013.01); H01J 37/18 (2013.01); H01J 27/26 (2013.01); H01J 2237/006 (2013.01); H01J 2237/0807 (2013.01);
Abstract

In order to provide an ion beam apparatus excellent in safety and stability even when a sample is irradiated with hydrogen ions, the ion beam apparatus includes a vacuum chamber, a gas field ion source that is installed in the vacuum chamber and has an emitter tip, and gas supply means for supplying a gas to the emitter tip. The gas supply means includes a mixed gas chamber that is filled with a hydrogen gas and a gas for diluting the hydrogen gas below an explosive lower limit.

Find Patent Forward Citations

Shichi, Hiroyasu. (2020). Ion beam device (U.S. Patent No. 10636623). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10636623

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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