The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2020
Filed:
Mar. 20, 2018
Applicants:
Tescan Brno S.r.o., Brno, CZ;
Tescan Tempe, Llc., Tempe, AZ (US);
Inventors:
Petras Stanislav, Strakonice-Predni Ptakovice, CZ;
Lencova Bohumila, Kurim, CZ;
Benner Gerd Ludwig, Aalen, DE;
Jon Karl Weiss, Tempe, AZ (US);
Assignee:
TESCAN ORSAY HOLDING, A.S., Brno, CZ;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); G01N 23/20058 (2018.01); H01J 37/244 (2006.01); H01J 37/20 (2006.01); H01J 37/295 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/268 (2013.01); G01N 23/20058 (2013.01); H01J 37/20 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 37/2955 (2013.01); H01J 2237/1505 (2013.01); H01J 2237/1506 (2013.01); H01J 2237/1507 (2013.01); H01J 2237/1508 (2013.01); H01J 2237/2802 (2013.01);
Abstract
A scanning transmission electron microscope is adapted to acquire high quality precession electron diffraction (PED) patterns by means of separated scanning deflectors and precession deflectors. Magnetic or electrostatic deflectors may be used for scanning and for precession. This enables independent optimization of parameters for each deflection system to achieve a broad operating range simultaneously for both deflection systems.