The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2020
Filed:
Jun. 17, 2019
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventor:
Bernhard Geuppert, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, unknown;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70191 (2013.01); G03F 7/708 (2013.01); G03F 7/709 (2013.01); G03F 7/7015 (2013.01); G03F 7/7085 (2013.01); G03F 7/70258 (2013.01); G03F 7/70833 (2013.01);
Abstract
A lithography system has a projection lens that includes a first optical element and a first sensor subframe. The projection lens also includes first sensor which is configured to detect a position of the first optical element with respect to the first sensor subframe. The projection lens further includes a second sensor which is configured to detect a position of a wafer with respect to the first sensor subframe.