The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2020
Filed:
May. 31, 2018
Bruker Jv Israel Ltd., Migdal HaEmek, IL;
Nikolai Kasper, Rheinzabern, DE;
Juliette P. M. van der Meer, Karlsruhe, DE;
Elad Yaacov Schwarcz, Givatayim, IL;
Matthew Wormington, Littleton, CO (US);
BRUKER TECHNOLOGIES LTD., Migdal Haemek, IL;
Abstract
An apparatus for X-ray measurement, includes an X-ray source, an X-ray detector, an optical inclinometer, and a processor. The X-ray source is configured to generate and direct an X-ray beam to be incident at a grazing angle on a surface of a sample. The X-ray detector is configured to measure X-ray fluorescence emitted from the surface of the sample in response to being excited by the X-ray beam. The optical inclinometer is configured to measure an inclination of the surface of the sample. The processor is configured to calibrate the grazing angle of the X-ray beam based on the measured inclination, and to further fine-tune the grazing angle based on the X-ray fluorescence measured by the X-ray detector.