The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2020
Filed:
Oct. 12, 2018
Applicants:
Griffin A. P. Hovorka, Lincoln, NE (US);
Jeremy A. Van Derslice, Dwight, NE (US);
Inventors:
Griffin A. P. Hovorka, Lincoln, NE (US);
Jeremy A. Van Derslice, Dwight, NE (US);
Assignee:
J.A. WOOLLAM CO., INC., Lincoln, NE (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/21 (2006.01);
U.S. Cl.
CPC ...
G01N 21/211 (2013.01); G01N 2021/213 (2013.01); G01N 2201/0635 (2013.01); G01N 2201/0683 (2013.01);
Abstract
A snapshot ellipsometer or polarimeter which does not require temporally modulated element(s) to measure a sample, but instead uses one or more spatially varying compensators, (eg. microretarder arrays and compound prisms), to vary the polarization state within a measurement beam of electromagnetic radiation. Analysis of the intensity profile of the beam after interaction with the spatially varying compensator(s) and the sample allows sample parameters to be characterized without any moving optics.