The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2020
Filed:
Jun. 14, 2017
Tokyo Electron Limited, Tokyo, JP;
Kippei Sugita, Miyagi, JP;
Tomohide Minami, Miyagi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
Provided is a measuring instrument for measuring an electrostatic capacity. The measuring instrument includes a base substrate having a disk shape, a plurality of first sensors arranged along an edge of the base substrate and respectively provide a plurality of side electrodes, one or more second sensors each of which has a bottom electrode provided along a bottom surface of the base substrate, and a circuit board. The circuit board is configured to apply a high frequency signal to the plurality of side electrodes and the bottom electrode, to generate a plurality of first measurement values respectively indicating electrostatic capacities based on voltage amplitudes in the plurality of side electrodes, and to generate a second measurement value indicating an electrostatic capacity based on a voltage amplitude in the bottom electrode.