The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 28, 2020

Filed:

Sep. 01, 2016
Applicant:

Kabushiki Kaisha Toyota Chuo Kenkyusho, Nagakute-shi, Aichi-ken, JP;

Inventors:

Taishi Kimura, Nagakute, JP;

Daisuke Nakamura, Nagakute, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/14 (2006.01); C23C 16/34 (2006.01); C30B 25/08 (2006.01); C01B 21/06 (2006.01); C30B 29/40 (2006.01);
U.S. Cl.
CPC ...
C30B 25/14 (2013.01); C01B 21/0632 (2013.01); C23C 16/34 (2013.01); C30B 25/08 (2013.01); C30B 29/406 (2013.01); C01P 2006/10 (2013.01); C01P 2006/80 (2013.01);
Abstract

In a gallium nitride crystal, a nanovoid density in the crystal is less than 1×10[cm]. A crystal growth apparatus is an apparatus for manufacturing a gallium nitride crystal, wherein a member having a B concentration of less than 1 ppm at least at a surface part is used as a member used at a part where a temperature is 500° C. or higher (high-temperature member) among members exposed to a crystal growth space. When such a crystal growth apparatus is used, a gallium nitride crystal wherein a nanovoid density in the crystal is less than 1×10[cm] is obtained.


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