The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2020
Filed:
Jan. 06, 2017
Ebara Corporation, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
To provide a polishing apparatus capable of polishing bevel portions of varying shape by selecting a suitable polishing recipe, based on a state before polishing. The polishing apparatuscomprises: a holding/polishing unitfor holding and polishing a workpiece W; and an identifying unitfor identifying dataassociated with a state of the peripheral portion of the substrate Wbefore polishing. The holding/polishing unitcomprises: a holderfor holding and rotating the substrate W; and a polisherfor polishing the peripheral portion of the substrate Wby pressing a polishing member against the peripheral portion. A polishing-condition determinerdetermines a polishing condition, based on dataindicating to which type, of a plurality of shape-related types, the shape of a given peripheral portion belongs.