The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2020
Filed:
Mar. 13, 2017
Hitachi, Ltd., Chiyoda-ku, Tokyo, JP;
HITACHI, LTD., Tokyo, JP;
Abstract
An electron microscope that measures electromagnetic field information separates an electric field distribution and a magnetic field distribution of a specimen with high precision to measure the electromagnetic field information. The electron microscope is configured with an electron source, an electron gun deflection coil, converging lensesand, an irradiation system astigmatic compensation coil, irradiation system deflection coilsand, a magnetic field application coil, an objective lens, an imaging system astigmatic compensation coil, imaging system deflection coilsand, a magnifying lens, an electron detector, a control analysis apparatus, and the like, and the control analysis apparatusrepeats a plurality of times measurement of first electromagnetic field information with an output signal from the electron detector by exercising first electron beam control after a first magnetic field is applied to the specimenand then measurement of second electromagnetic field information similarly by exercising second electron beam control after a second magnetic field is applied to the specimen, and separates and measures an electric field distribution and a magnetic field distribution with high precision from the obtained first and second electromagnetic field information.