The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2020
Filed:
Nov. 08, 2018
Jeol Ltd., Tokyo, JP;
Tomohisa Fukuda, Tokyo, JP;
JEOL Ltd., Tokyo, JP;
Abstract
A charged particle beam device includes: a detection chamber flange; a detector; a detector holding stand which holds the detector; a first shaft which is slidably inserted into a guide hole and connected to the detector holding stand, the guide hole being provided in the detection chamber flange; a first flange which is attached to the detection chamber flange and has a spherical bearing; a second flange which is supported by the spherical bearing of the first flange; and a second shaft which is slidably inserted into a guide hole provided in the second flange and passes through a through-hole in the detection chamber flange to be connected to the detector holding stand, each of the first shaft and the second shaft being provided with a flow channel of a heat transfer medium for cooling or heating the detector.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile