The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2020
Filed:
Nov. 14, 2014
Asml Netherlands B.v., Veldhoven, NL;
Scott Anderson Middlebrooks, Veldhoven, NL;
Willem Maria Julia Marcel Coene, Veldhoven, NL;
Frank Arnoldus Johannes Maria Driessen, Veldhoven, NL;
Adrianus Cornelis Matheus Koopman, Veldhoven, NL;
Markus Gerardus Martinus Maria Van Kraaij, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A defect prediction method for a device manufacturing process involving production substrates processed by a lithographic apparatus, the method including training a classification model using a training set including measured or determined values of a process parameter associated with the production substrates processed by the device manufacturing process and an indication regarding existence of defects associated with the production substrates processed in the device manufacturing process under the values of the process parameter, and producing an output from the classification model that indicates a prediction of a defect for a substrate.