The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2020
Filed:
Dec. 21, 2018
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Anthony J. Annunziata, Stamford, CT (US);
Chandrasekharan Kothandaraman, New York, NY (US);
Nathan P. Marchack, White Plains, NY (US);
Hiroyuki Miyazoe, White Plains, NY (US);
Assignee:
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 43/12 (2006.01); H01L 43/08 (2006.01); H01F 10/32 (2006.01); H01F 41/30 (2006.01); H01F 10/13 (2006.01);
U.S. Cl.
CPC ...
H01L 43/12 (2013.01); H01F 10/132 (2013.01); H01F 10/3254 (2013.01); H01F 41/308 (2013.01); H01L 43/08 (2013.01);
Abstract
Methods for forming magnetic tunnel junctions and structures thereof include cryogenic etching the layers defining the magnetic tunnel junction without lateral diffusion of reactive species.