The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2020
Filed:
Apr. 18, 2019
Disco Corporation, Tokyo, JP;
Kazunari Tanaka, Tokyo, JP;
Satoshi Ohkawara, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A conveying mechanism for conveying a wafer unit having a wafer disposed inside of and supported on an annular frame by a holding tape includes a housing tray housing the wafer unit therein and a transport unit supporting and transporting the housing tray between wafer treating apparatus. The housing tray includes a ceiling plate and a bottom plate that are interconnected by a pair of side walls facing each other across an opening defined in a side through which the wafer unit can be taken into and out of the housing tray. An air flow generator is disposed on the ceiling plate for generating air downflows in the housing tray that are directed from the ceiling plate into the opening. The transport unit conveys wafer units, one by one, between the wafer treating apparatus.