The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2020

Filed:

Oct. 31, 2017
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Effendi Leobandung, Stormville, NY (US);

Yanning Sun, Scarsdale, NY (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 29/08 (2006.01); H01L 29/10 (2006.01); H01L 29/66 (2006.01); H01L 29/778 (2006.01); H01L 29/205 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02546 (2013.01); H01L 29/0847 (2013.01); H01L 29/1054 (2013.01); H01L 29/66545 (2013.01); H01L 29/7781 (2013.01); H01L 29/205 (2013.01);
Abstract

The present invention relates generally to semiconductor devices and more particularly, to a method of forming a replacement channel composed of a III-V compound semiconductor material in a doped layer of a III-V compound semiconductor substrate. The replacement channel may be formed by removing a portion of the doped layer located directly below a dummy gate stack that has been removed. A III-V compound semiconductor material may be grown in the removed the portion to form the replacement channel and a gate stack may be formed on the replacement channel.


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