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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10620158 B1

PDFFull Text
Expired
Date of Patent:
Apr. 14, 2020

Filed:

Jun. 15, 2017

High density nano-array for sensing

Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Qing Cao, Yorktown Heights, NY (US);

Kangguo Cheng, Schenectady, NY (US);

Zhengwen Li, Scarsdale, NY (US);

Fei Liu, Yorktown Heights, NY (US);

Zhen Zhang, Ossining, NY (US);

Assignee:

INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);

Attorneys:

Tutunjian & Bitetto, P.C.

Vazken Alexanian

Primary Examiner:

Hrayr A Sayadian

Int. Cl.
CPC ...
G01N 27/447 (2006.01); G01N 27/414 (2006.01); G01N 33/487 (2006.01); H01L 21/02 (2006.01); H01L 21/3065 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
G01N 27/44791 (2013.01); G01N 27/4146 (2013.01); G01N 33/48707 (2013.01); H01L 21/02236 (2013.01); H01L 21/3065 (2013.01); H01L 21/31116 (2013.01);
Abstract

A sensor includes a semiconductor substrate having first pointed nodes extending into a channel from a first side of the channel. Second pointed nodes extend into the channel from a second side of the channel, which is opposite the first side. The second pointed nodes being self-aligned to the first pointed nodes on the opposite side of the channel. The first pointed nodes and the second pointed nodes are connected to a circuit to detect particles in the channel.

Find Patent Forward Citations

Cao, Qing. (2020). High density nano-array for sensing (U.S. Patent No. 10620158). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10620158

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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