The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2020
Filed:
Mar. 04, 2015
Ebara Corporation, Tokyo, JP;
Kuniaki Yamaguchi, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
The present invention relates to a substrate processing system and a substrate processing method capable of cleaning a processing-liquid supply line. A substrate processing system includes: a substrate processing apparatus () configured to process a substrate W; and a flushing device for cleaning a distribution line () and a processing-liquid supply line (). The flushing device includes: a cleaning-liquid supply line () coupled to the distribution line (); a drain mechanism () configured to direct a cleaning liquid, supplied into the processing-liquid supply line () through the distribution line (), to a liquid disposal area (); a supply switching valve () configured to allow only the processing liquid or the cleaning liquid to flow in the distribution line (); and an operation controller () configured to control operations of the drain mechanism () and the supply switching valve ().