The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2020
Filed:
Sep. 25, 2018
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Jun Young Chung, Gyeonggi-do, KR;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); H01L 21/3065 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32522 (2013.01); H01J 37/32449 (2013.01); H01J 37/32834 (2013.01); H01L 21/3065 (2013.01); H01L 21/31138 (2013.01); H01L 21/67069 (2013.01); H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H01L 21/67253 (2013.01); H01L 21/6831 (2013.01); H01L 21/6833 (2013.01); H01J 2237/3341 (2013.01);
Abstract
A temperature control method of controlling a temperature of an object to be processed includes supplying a heat-transfer gas between an object to be processed and a mounting stage from a gas port from among a plurality of gas ports provided in a mounting stage, exhausting the heat-transfer gas from another gas port different from the gas port, detecting pressure of the gas port supplying the heat-transfer gas and the another gas port exhausting the heat-transfer gas, and adjusting the pressure.