The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2020

Filed:

Mar. 18, 2016
Applicant:

Nissan Chemical Industries, Ltd., Tokyo, JP;

Inventors:

Tokio Nishita, Toyama, JP;

Rikimaru Sakamoto, Toyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); H01L 21/027 (2006.01); G03F 7/40 (2006.01); C09D 133/06 (2006.01); G03F 7/32 (2006.01); G03F 7/42 (2006.01); H01L 21/308 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0035 (2013.01); C09D 133/062 (2013.01); G03F 7/32 (2013.01); G03F 7/40 (2013.01); G03F 7/405 (2013.01); G03F 7/42 (2013.01); H01L 21/027 (2013.01); H01L 21/0273 (2013.01); H01L 21/3086 (2013.01);
Abstract

A coating solution has a polymer having a formula (1) structural unit, a formula (2) primary, secondary, or tertiary amine, and a formula (3) ester capable of dissolving the polymer and amine: Ris a hydrogen atom or methyl group. L is a divalent aromatic group optionally having at least one substituent, —C(═O)—O— group, or —C(═O)—NH— group. The —C(═O)—O— or —C(═O)—NH— group carbon atom is attached to a polymer main chain. X is a hydrogen atom or linear or branched alkyl or alkoxy group having a 1-10 carbon atom number. At least one alkyl group hydrogen atom is optionally substituted with a halogen atom or hydroxy group. R, R, and Rare independently a hydrogen atom, hydroxy group, or linear, branched, or cyclic organic group having a 1-16 carbon atom number. Rand Rare each independently a linear or branched organic group having a 1-16 carbon atom number.


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