The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2020

Filed:

Feb. 12, 2019
Applicant:

Jeol Ltd., Tokyo, JP;

Inventor:

Shingo Kinoshita, Tokyo, JP;

Assignee:

JEOL Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/2252 (2018.01);
U.S. Cl.
CPC ...
G01N 23/2252 (2013.01);
Abstract

A method of sample analysis is offered which provides improved quantitative accuracy. This method starts with irradiating a sample with an electron beam. Characteristic X-rays emanating from the sample are detected. Plural data sets about intensities of characteristic X-rays corresponding to a specific element contained in the sample are obtained. The element is quantitatively analyzed based on the plural data sets. This method includes a step (S) for calculating quantitative values for the element for the plural data sets, respectively, about the characteristic X-ray intensities, a step (S) for calculating weights for the quantitative values, respectively, based on the plural data sets about the characteristic X-ray intensities, and a step (S) for calculating a weighted average of the quantitative values based on the weights.


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