The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2020

Filed:

Apr. 05, 2018
Applicant:

Shin-etsu Chemical Co., Ltd., Tokyo, JP;

Inventors:

Naofumi Shinya, Echizen, JP;

Yu Hamaguchi, Echizen, JP;

Norio Yamagata, Echizen, JP;

Takehisa Minowa, Echizen, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 9/00 (2006.01); C30B 1/02 (2006.01); C30B 9/06 (2006.01); C30B 19/04 (2006.01); C30B 19/12 (2006.01); C30B 29/36 (2006.01); C30B 33/02 (2006.01);
U.S. Cl.
CPC ...
C30B 1/02 (2013.01); C30B 9/06 (2013.01); C30B 19/04 (2013.01); C30B 19/12 (2013.01); C30B 29/36 (2013.01); C30B 33/02 (2013.01);
Abstract

A SiC single crystal is prepared by the solution process of placing a seed crystal in contact with a Si—C solution in a crucible and letting a SiC single crystal to grow from the seed crystal. The method includes the first growth step of conducting crystal growth using (0001) or (000-1) plane of a SiC single crystal of which the seed crystal is composed, as the growth surface, and the second growth step of conducting crystal growth using (1-100) or (11-20) plane of a SiC single crystal resulting from the first growth step as the growth surface. A SiC single crystal of high homogeneity and quality is obtained, which is reduced in threading screw dislocations, threading edge dislocations, basal plane dislocations, micropipes, and stacking faults.


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