The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2020

Filed:

Jan. 17, 2019
Applicant:

Dai Nippon Printing Co., Ltd., Tokyo, JP;

Inventors:

Chikao Ikenaga, Tokyo, JP;

Hiroaki Nakayama, Tokyo, JP;

Kazunari Ikeda, Tokyo, JP;

Chiaki Hatsuta, Tokyo, JP;

Utako Oouchi, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/56 (2006.01); C23C 14/04 (2006.01); C23F 1/00 (2006.01); C21D 1/74 (2006.01); C21D 6/00 (2006.01); C22C 38/08 (2006.01); C22C 38/40 (2006.01); C23F 1/02 (2006.01); C23F 1/28 (2006.01); H05B 33/10 (2006.01); C23C 14/58 (2006.01); H01L 51/50 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/042 (2013.01); C21D 1/74 (2013.01); C21D 6/001 (2013.01); C22C 38/08 (2013.01); C22C 38/40 (2013.01); C23C 14/04 (2013.01); C23C 14/58 (2013.01); C23F 1/00 (2013.01); C23F 1/02 (2013.01); C23F 1/28 (2013.01); H01L 51/50 (2013.01); H01L 51/56 (2013.01); H05B 33/10 (2013.01); H01L 51/0011 (2013.01);
Abstract

The present invention provides a metal sheet, on a first surface of which a resist pattern having a narrow width can be stably provided. This manufacturing method for a metal sheet includes a preparation step of preparing a sheet material comprising an iron alloy that contains nickel. When a composition analysis of the first surface of the metal sheet obtained from the sheet material is performed using X-ray photoelectron spectroscopy, the ratio A1/A2 obtained by the result of the X-ray photoelectron spectroscopy does not exceed 0.4, where A1 is the sum of the peak area value of nickel oxide and the peak area value of nickel hydroxide, and A2 is the sum of the peak area value of iron oxide and the peak area value of iron hydroxide.


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