The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2020
Filed:
Jun. 16, 2016
Disco Corporation, Tokyo, JP;
Yu Kudo, Tokyo, JP;
Keiji Nomaru, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A laser processing apparatus includes a laser beam applying unit. The laser beam applying unit includes a laser oscillator for oscillating a laser beam, a focusing lens for focusing the laser beam to apply the laser beam to a wafer, a first optical path changing part, a second optical path changing part, and a controller. The first optical path changing part has a pair of first-axis resonant scanners which are disposed on the downstream side with respect to the propagating direction of the laser beam oscillated from the laser oscillator and which change the optical path of the laser beam into a Y-axis direction. The second optical path changing part has a pair of second-axis resonant scanners which are disposed between the first optical path changing part and the focusing lens and which change the optical path of the laser beam into an X-axis direction.