The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2020
Filed:
Aug. 15, 2016
Mitsui Chemicals, Inc., Minato-ku, Tokyo, JP;
Kazuo Kohmura, Chiba, JP;
Takashi Kozeki, Otake, JP;
Daiki Taneichi, Chiba, JP;
Shintaro Maekawa, Ichihara, JP;
Yosuke Ono, Sodegaura, JP;
Tsuneaki Biyajima, Otake, JP;
MITSUI CHEMICALS, INC., Minato-Ku, Tokyo, JP;
Abstract
The purpose of the present invention is to provide: a pellicle frame which is not susceptible to deterioration even if irradiated with short-wavelength light such as excimer light, and which is not susceptible to generation of an outgas or foreign substance; and a pellicle which uses this pellicle frame. In order to achieve the above-described purpose, this pellicle frame for supporting the outer periphery of a pellicle film is configured to comprise a frame and a film that is formed on the surface of the frame and contains a polyimide resin.