The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 31, 2020

Filed:

Nov. 02, 2015
Applicant:

Fujikin Incorporated, Osaka, JP;

Inventors:

Atsushi Hidaka, Osaka, JP;

Masaaki Nagase, Osaka, JP;

Kaoru Hirata, Osaka, JP;

Satoru Yamashita, Osaka, JP;

Keiji Hirao, Osaka, JP;

Kouji Nishino, Osaka, JP;

Nobukazu Ikeda, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01); C23C 16/455 (2006.01); B01J 4/00 (2006.01); G01F 23/24 (2006.01); C23C 16/448 (2006.01); G01F 23/26 (2006.01); H01L 21/67 (2006.01); G01F 23/22 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45561 (2013.01); B01J 4/00 (2013.01); C23C 16/448 (2013.01); G01F 23/247 (2013.01); G01F 23/26 (2013.01); H01L 21/31 (2013.01); H01L 21/67248 (2013.01); C23C 16/4481 (2013.01); G01F 23/22 (2013.01);
Abstract

To provide a liquid level indicator and a liquid raw material vaporization feeder, in which the time to detect a switch from the liquid phase to the gas phase has reduced flow rate dependence, and also the detection time can be shortened. The present invention includes a chamberthat stores a liquid raw material, at least one protection tubehousing a resistance temperature detector for detecting the liquid level Lin the chamber, and a flow controllerthat controls the flow rate of the gas flowing out from the chamberand feeds the same. The protection tubeis horizontally inserted into a sidewallof the chamberand fixed thereto.


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