The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 24, 2020

Filed:

Apr. 13, 2018
Applicant:

Qorvo Us, Inc., Greensboro, NC (US);

Inventors:

Dana Jay Sturzebecher, Cary, NC (US);

Larry Charles Witkowski, Plano, TX (US);

Arthur Donald Ballato, Pinehurst, NC (US);

Andrew Arthur Ketterson, Dallas, TX (US);

Assignee:

Qorvo US, Inc., Greensboro, NC (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/54 (2006.01); H03H 9/205 (2006.01); H03H 9/56 (2006.01); H03H 3/02 (2006.01); H03H 9/05 (2006.01); H03H 9/17 (2006.01); H03H 9/02 (2006.01);
U.S. Cl.
CPC ...
H03H 9/205 (2013.01); H03H 3/02 (2013.01); H03H 9/02031 (2013.01); H03H 9/02062 (2013.01); H03H 9/0561 (2013.01); H03H 9/175 (2013.01); H03H 9/564 (2013.01); H03H 9/568 (2013.01); H03H 2003/025 (2013.01);
Abstract

A BAW device includes a substrate, a first reflector, and at least two BAW transducers. The first reflector resides over the substrate and has a plurality of reflector layers. A first BAW transducer resides over a first section of the first reflector, has a first series resonance frequency, and has a first piezoelectric layer of a first thickness between a first top electrode and a first bottom electrode. The second BAW transducer resides over a second section of the first reflector, has a second series resonance frequency that is different than the first series resonance frequency, and has a second piezoelectric layer of a second thickness, which is different than the first thickness, between a second top electrode and a second bottom electrode.


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