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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10600669 B1

PDFFull Text
Date of Patent:
Mar. 24, 2020

Filed:

Feb. 22, 2018

Substrate fixture and substrate fixing device

Applicant:

Shinko Electric Industries Co., Ltd., Nagano-shi, Nagano, JP;

Inventor:

Norio Shiraiwa, Nagano, JP;

Assignee:

SHINKO ELECTRIC INDUSTRIES CO., LTD., Nagano-Shi, JP;

Attorney:

Rankin, Hill & Clark LLP

Primary Examiner:

Dharti H Patel

Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/67 (2006.01); H01J 37/32 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); H01J 37/32724 (2013.01); H01L 21/67069 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/6831 (2013.01); H01L 21/68742 (2013.01); H01L 21/68757 (2013.01); H01L 21/68771 (2013.01); H01J 37/3244 (2013.01); H01J 2237/2001 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/334 (2013.01);
Abstract

A substrate fixture includes a monopolar chuck main body comprising an insulated plate and an electrode embedded in the insulated plate, a tray placed on the chuck main body, having an upper surface in which a plurality of concave parts for accommodating therein a plurality of substrates is formed, and formed of an insulator having a volume resistivity equal to or lower than a volume resistivity of the insulated plate, and an yttrium oxide layer formed on the upper surface of the tray.

Find Patent Forward Citations

Shiraiwa, Norio. (2020). Substrate fixture and substrate fixing device (U.S. Patent No. 10600669). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10600669

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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