The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 24, 2020

Filed:

Sep. 18, 2018
Applicant:

Screen Holdings Co., Ltd., Kyoto, JP;

Inventors:

Masanori Imamura, Kyoto, JP;

Kazuo Morioka, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/027 (2006.01); B05C 11/10 (2006.01); H01L 21/67 (2006.01); B05B 12/08 (2006.01); B05B 15/40 (2018.01); B05C 11/08 (2006.01); B05C 11/02 (2006.01); A61J 3/00 (2006.01); B05B 13/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/027 (2013.01); B05B 12/088 (2013.01); B05B 15/40 (2018.02); B05C 11/023 (2013.01); B05C 11/08 (2013.01); B05C 11/10 (2013.01); B05C 11/1002 (2013.01); H01L 21/6715 (2013.01); A61J 3/005 (2013.01); B05B 13/02 (2013.01);
Abstract

A coating apparatus includes an open/close valve having a motor that allows control of opening operation and closing operation in accordance with electric signals applied from a controller. The coating apparatus further includes a suck back valve having a motor that allows control of a volume variation in a flow path for suck back that is in communication with an upstream side and a downstream side of a pipe in accordance with electric signals from the controller. The controller allows control of start of the closing operation of the open/close valve and start of suction operation of the suck back valve through application of the electric signals to the respective motors. This achieves simple adjustment of liquid cut-off.


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