The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2020
Filed:
Nov. 15, 2018
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Tamer Coskun, San Jose, CA (US);
Rudolf C. Brunner, Menlo Park, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01); G03F 9/00 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 9/7088 (2013.01); G03F 7/7085 (2013.01); G03F 7/70483 (2013.01); G03F 7/70683 (2013.01); G03F 9/7007 (2013.01); G03F 9/7049 (2013.01); G03F 9/7073 (2013.01); G03F 9/7076 (2013.01);
Abstract
A method of aligning a plate containing a substrate is disclosed wherein multiple cameras with distinct fields of view are aligned with mark cells that are within the field of view of each of the multiple cameras.