The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2020
Filed:
Oct. 31, 2014
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03F 7/20 (2006.01); G02B 19/00 (2006.01); G02B 17/00 (2006.01); G02B 5/08 (2006.01); G02B 5/18 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70191 (2013.01); G02B 5/0891 (2013.01); G02B 5/1861 (2013.01); G02B 17/002 (2013.01); G02B 19/0023 (2013.01); G02B 19/0047 (2013.01); G02B 19/0095 (2013.01); G03F 7/702 (2013.01); G03F 7/70075 (2013.01); G03F 7/70575 (2013.01);
Abstract
Illumination optical unit for illuminating an object field in a projection exposure apparatus, comprising a first facet mirror with a structure, which has a spatial frequency of at least 0.2 mmin at least one direction, and a second facet mirror, comprising a multiplicity of facets, wherein the facets are respectively provided with a mechanism for damping spatial frequencies of the structure of the first facet mirror.