The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2020
Filed:
May. 23, 2019
Rigaku Corporation, Tokyo, JP;
Satoshi Murakami, Takatsuki, JP;
Kazuhiko Omote, Tokyo, JP;
Shinya Kikuta, Takatsuki, JP;
Akihiro Ikeshita, Takatsuki, JP;
Rigaku Corporation, Akishima-shi, Tokyo, JP;
Abstract
The X-ray reflectometer of the present invention includes: an irradiation angle variable unit () configured to vary an irradiation angle of a focused X-ray beam () with a sample surface (); a position sensitive detector () which is fixed; and a reflection intensity calculation unit () configured to, per reflection angle of reflected X-rays () constituting a reflected X-ray beam (), integrate a detected intensity by a corresponding detection element (), for only the detection elements () positioned within a divergence angle width of the reflected X-ray beam () in the position sensitive detector (), in synchronization of variation in the irradiation angle (θ) of the focused X-ray beam () by the irradiation angle variable unit ().