The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 24, 2020

Filed:

Nov. 17, 2017
Applicants:

Boe Technology Group Co., Ltd., Beijing, CN;

Chengdu Boe Optoelectronics Technology Co., Ltd., Sichuan Province, CN;

Inventors:

Chenliang Liu, Beijing, CN;

Donghua Jiang, Beijing, CN;

Yongyi Fu, Beijing, CN;

Chao Tan, Beijing, CN;

Xuewei Wang, Beijing, CN;

Rujian Li, Beijing, CN;

Kang Luo, Beijing, CN;

Yongzhou Ling, Beijing, CN;

Yin Xie, Beijing, CN;

Jianbo Yang, Beijing, CN;

Fei Li, Beijing, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16C 29/06 (2006.01); F16M 11/04 (2006.01); H01J 37/20 (2006.01); H01L 21/68 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
F16C 29/06 (2013.01); F16M 11/043 (2013.01); H01J 37/20 (2013.01); G03F 7/70716 (2013.01); H01J 2237/20221 (2013.01);
Abstract

A bearing device and an ion implantation device are provided. The bearing device includes a bearing table configured to bear a substrate, and a plurality of supporting components configured to support the substrate, each supporting component is movably arranged on the bearing table, to support the substrate at an adjustable position.


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