The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2020
Filed:
Sep. 12, 2017
Shinko Electric Industries Co., Ltd., Nagano, JP;
Tatsuro Yoshida, Nagano, JP;
Yoji Asahi, Nagano, JP;
SHINKO ELECTRIC INDUSTRIES CO., LTD., Nagano, JP;
Abstract
An electrostatic chuck includes a heating part, a substrate on the heating part, a temperature sensor, and a metal material. The substrate includes a first surface onto which an object is to be attracted and held, a second surface opposite from the first surface and contacting the heating part, and a first hole and a second hole aligned in a thickness direction of the substrate in communication with each other. The second hole is closer to the heating part than is the first hole, and open at the second surface of the substrate. The second hole is larger than the first hole when viewed in the thickness direction of the substrate. The temperature sensor is at the bottom of the first hole. The metal material is in the second hole with a space between the temperature sensor and the metal material.