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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10593539 B1

PDFFull Text
Date of Patent:
Mar. 17, 2020

Filed:

Apr. 26, 2012

Support assembly

Applicants:

Chien-teh Kao, Sunnyvale, CA (US);

Joel M. Huston, San Jose, CA (US);

Mei Chang, Saratoga, CA (US);

Xiaoxiong (John) Yuan, San Jose, CA (US);

Inventors:

Chien-Teh Kao, Sunnyvale, CA (US);

Joel M. Huston, San Jose, CA (US);

Mei Chang, Saratoga, CA (US);

Xiaoxiong (John) Yuan, San Jose, CA (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:

Patterson + Sheridan LLP

Primary Examiner:

Karla A Moore

Assistant Examiner:

Tiffany Z Nuckols

Int. Cl.
CPC ...
B23K 10/00 (2006.01); H01L 21/02 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01); C23C 14/54 (2006.01); C23C 14/50 (2006.01); C23C 14/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02104 (2013.01); C23C 14/022 (2013.01); C23C 14/50 (2013.01); C23C 14/541 (2013.01); H01J 37/3244 (2013.01); H01J 37/32082 (2013.01); H01J 37/32357 (2013.01); H01J 37/32522 (2013.01); H01J 37/32541 (2013.01); H01J 37/32568 (2013.01); H01J 37/32862 (2013.01); H01L 21/67069 (2013.01); H01L 21/67109 (2013.01); H01J 2237/2001 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A method and apparatus for removing native oxides from a substrate surface is provided. In one aspect, the apparatus comprises a support assembly. In one embodiment, the support assembly includes a shaft coupled to a disk-shaped body. The disk-shaped body includes an upper surface, a lower surface and a cylindrical outer surface. A flange extends radially outward from the cylindrical outer surface. A fluid channel is formed in the disk-shaped body and is coupled to the heat transfer fluid conduit of the shaft. A plurality of grooves formed in the upper surface are coupled by a hole to the vacuum conduit of the shaft. A gas conduit formed through the disk-shaped body couples the gas conduit of the shaft to the cylindrical outer surface of the disk-shaped body.

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