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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10591194 B1

PDFFull Text
Date of Patent:
Mar. 17, 2020

Filed:

Sep. 12, 2017

Temperature control method

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Yasuharu Sasaki, Miyagi, JP;

Kazuyoshi Matsuzaki, Ibaraki, JP;

Assignee:

Tokyo Electron Limited, Tokyo, JP;

Attorney:

IPUSA, PLLC

Primary Examiner:

Keith M Raymond

Assistant Examiner:

Gustavo A Hincapie Serna

Int. Cl.
CPC ...
F25B 43/02 (2006.01); H01L 21/67 (2006.01); H01J 37/32 (2006.01); F25B 31/00 (2006.01); F04C 29/04 (2006.01); F04C 18/00 (2006.01); F25B 13/00 (2006.01); F25B 49/02 (2006.01); F25B 1/053 (2006.01);
U.S. Cl.
CPC ...
F25B 43/02 (2013.01); F04C 18/00 (2013.01); F04C 29/042 (2013.01); F25B 31/004 (2013.01); H01J 37/32724 (2013.01); H01L 21/67017 (2013.01); H01L 21/67109 (2013.01); F25B 1/053 (2013.01); F25B 13/00 (2013.01); F25B 49/02 (2013.01); F25B 2600/21 (2013.01);
Abstract

A temperature control method is performed by a temperature control apparatus including a heat exchanger configured to exchange heat using a phase change of a refrigerant, a rotary pump configured to receive the refrigerant from the heat exchanger and fuse the refrigerant with oil contained inside the rotary pump, and an oil refrigerant separator configured to receive the refrigerant fused with the oil from the rotary pump and separate the refrigerant from the oil. The temperature control method includes the steps of: circulating the refrigerant separated from the oil back to the heat exchanger; and adjusting at least one of a rotation speed of a rotor of the rotary pump, a position of a valve arranged at a connecting portion of the rotary pump and the heat exchanger, and a position of an airflow adjustment valve arranged at a connecting portion of the oil refrigerant separator and the heat exchanger.

Find Patent Forward Citations

Sasaki, Yasuharu. (2020). Temperature control method (U.S. Patent No. 10591194). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10591194

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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