The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2020
Filed:
Mar. 16, 2018
International Business Machines Corporation, Armonk, NY (US);
Michael T. Brigham, Bolton, VT (US);
Christopher V. Jahnes, Upper Saddle River, NJ (US);
Cameron E. Luce, Colchester, VT (US);
Jeffrey C. Maling, Grand Isle, VT (US);
William J. Murphy, North Ferrisburgh, VT (US);
Anthony K. Stamper, Burlington, VT (US);
Eric J. White, Charlotte, VT (US);
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
Abstract
Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are disclosed. The method includes forming a Micro-Electro-Mechanical System (MEMS) beam structure by venting both tungsten material and silicon material above and below the MEMS beam to form an upper cavity above the MEMS beam and a lower cavity structure below the MEMS beam.