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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10586920 B1

PDFFull Text
Date of Patent:
Mar. 10, 2020

Filed:

Jun. 28, 2018

Forming self-aligned contacts on pillar structures

Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Anthony J. Annunziata, Stamford, CT (US);

Daniel C. Edelstein, White Plains, NY (US);

Eugene J. O'Sullivan, Nyack, NY (US);

Henry K. Utomo, Ridgefield, CT (US);

Assignee:

International Business Machines Corporation, Armonk, NY (US);

Attorneys:

Vazken Alexanian

Ryan, Mason & Lewis, LLP

Primary Examiner:

Theresa T Doan

Int. Cl.
CPC ...
H01L 29/82 (2006.01); H01L 43/12 (2006.01); H01L 43/08 (2006.01); H01L 27/22 (2006.01); H01L 45/00 (2006.01);
U.S. Cl.
CPC ...
H01L 43/12 (2013.01); H01L 27/228 (2013.01); H01L 43/08 (2013.01); H01L 45/06 (2013.01);
Abstract

A semiconductor structure is disclosed herein. The semiconductor structure includes two or more pillar structures disposed over a top surface of a substrate. The semiconductor structure further includes two or more contacts to the two or more pillar structures. The semiconductor structure further includes an insulator disposed between the two or more pillar structures and the two or more contacts. The two or more contacts are self-aligned to the two or more pillar structures.

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Quick Actions:

Annunziata, Anthony. (2020). Forming self-aligned contacts on pillar structures (U.S. Patent No. 10586920). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10586920

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