The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 10, 2020

Filed:

Jan. 12, 2018
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Prakash Rau Mokhna Rau, Boise, ID (US);

Wesly McKinsey, Nampa, ID (US);

Rithu Bhonsle, Boise, ID (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/11524 (2017.01); H01L 27/11551 (2017.01); H01L 27/11556 (2017.01); B82Y 40/00 (2011.01); B82Y 10/00 (2011.01);
U.S. Cl.
CPC ...
H01L 27/11524 (2013.01); H01L 27/11551 (2013.01); H01L 27/11556 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); H01L 2924/1438 (2013.01);
Abstract

3D NAND memory cells can include a source layer, a dielectric layer disposed on the source layer, and a select gate source (SGS) layer disposed on the dielectric layer. A plurality of alternating layers of conducting material and insulating material can be disposed on the SGS layer. A conductive channel can be formed within a cell pillar trench. The conductive channel can be in contact with the source layer and the plurality of alternating layers. The cell pillar trench can be positioned in a substantially perpendicular orientation with respect to the plurality of alternating layers.


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