The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2020
Filed:
Jun. 29, 2016
Tokyo Electron Limited, Tokyo, JP;
Hiroshi Koizumi, Miyagi, JP;
Takehiro Shindo, Miyagi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A transfer device can have a high durability and no limit in an operation of an arm member. An electrostatic pickof a first transfer deviceis advanced into a process module, and a wafer W is electrostatically attracted to and held on the electrostatic pick. While the wafer W is being transferred into a load lock moduleby driving the first transfer device, the electrostatic pickis turned into an electrically floating state, so that a state in which the wafer W is electrostatically attracted to and held on the electrostatic pickis maintained. After the transferring of the wafer W to the load lock moduleis completed, charges of the electrostatic pickare neutralized, so that the wafer W is not electrostatically attracted to and held on the electrostatic pick