The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2020
Filed:
Apr. 16, 2019
Asml Netherlands B.v., Veldhoven, NL;
Samee Ur Rehman, Eindhoven, NL;
Anagnostis Tsiatmas, Eindhoven, NL;
Sergey Tarabrin, Eindhoven, NL;
Joannes Jitse Venselaar, 's-Hertogenbosch, NL;
Alexandru Onose, Eindhoven, NL;
Mariya Vyacheslavivna Medvedyeva, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Methods of determining a value of a parameter of interest are disclosed. In one arrangement, a symmetric component and an asymmetric component of a detected pupil representation from illuminating a target are derived. A first metric characterizing the symmetric component and a second metric characterizing the asymmetric component vary non-monotonically as a function of the parameter of interest over a reference range of values of the parameter of interest. A combination of the derived symmetric component and the derived asymmetric component are used to identify a correct value from a plurality of candidate values of the parameter of interest.