Terahertz measurement method and terahertz measuring apparatus for ascertaining a layer thickness or a distance of a measurement object

Abstract

The invention relates to a method and a terahertz measuring apparatus for measuring a layer thickness and/or a distance, wherein at least one terahertz beam () is radiated from a terahertz transmission and reception unit () along an optical axis (C) onto the measurement object () and terahertz radiation () that has passed through at least one layer () of the measurement object () and having been reflected is detected wherein a measurement signal (A) of the detected reflected terahertz radiation () is evaluated and a layer thickness (d) is ascertained from a propagation time difference (t−t) of the radiation () reflected at boundary layers () of the layer (). In this case, there is a provision for multiple measurements to be performed using different optical axes (C), wherein the optical axis (C) of the emitted terahertz radiation () is adjusted during the measurements or between the measurements and one of the multiple measurements is used for ascertaining the layer thickness (d). Preferably, the optical axis is adjusted continuously and/or periodically within an adjustment angle range (α) and in the process the multiple measurements are recorded, the measurement therefrom with maximum amplitude being used as the measurement for ascertaining the layer thickness.