The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2020
Filed:
May. 07, 2018
Applicant:
Gigaphoton Inc., Tochigi, JP;
Inventor:
Tatsuya Yanagida, Oyama, JP;
Assignee:
Gigaphoton Inc., Tochigi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05G 2/00 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
H05G 2/008 (2013.01); G03F 7/70033 (2013.01); H05G 2/003 (2013.01);
Abstract
An extreme ultraviolet light generating apparatus includes a target supply unit configured to output a target toward a predetermined region, a laser system configured to output a first laser beam with which the target is irradiated, a second laser beam with which the target is irradiated after being irradiated with the first laser beam, and a third laser beam with which the target is irradiated after being irradiated with the second laser beam, and an optical system configured to cause an irradiation beam diameter of the second laser beam at the target to be larger than an irradiation beam diameter of the third laser beam at the target.