The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 2020

Filed:

Mar. 07, 2018
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;

Inventors:

Jun-hyeok Ahn, Hwaseong-si, KR;

Eun-jung Kim, Daegu, KR;

Hui-jung Kim, Seongnam-si, KR;

Ki-seok Lee, Hwaseong-si, KR;

Bong-soo Kim, Yongin-si, KR;

Myeong-dong Lee, Seoul, KR;

Sung-hee Han, Hwaseong-si, KR;

Yoo-sang Hwang, Suwon-si, KR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/423 (2006.01); H01L 21/74 (2006.01); H01L 21/762 (2006.01); H01L 29/06 (2006.01); H01L 29/40 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/4236 (2013.01); H01L 21/743 (2013.01); H01L 21/76224 (2013.01); H01L 29/0649 (2013.01); H01L 29/401 (2013.01); H01L 29/42364 (2013.01); H01L 29/66621 (2013.01);
Abstract

An integrated circuit device may include a pair of line structures. Each line structure may include a pair of conductive lines extending over a substrate in a first horizontal direction and a pair of insulating capping patterns respectively covering the pair of conductive lines. The integrated circuit device may include a conductive plug between the pair of line structures and a metal silicide film contacting a top surface of the conductive plug between the pair of insulating capping patterns. The conductive plug may have a first width between the pair of conductive lines and a second width between the pair of insulating capping patterns, in a second horizontal direction perpendicular to the first horizontal direction, where the second width is greater than the first width.


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