The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 2020

Filed:

Sep. 04, 2018
Applicants:

Flosfia Inc., Kyoto, JP;

Kyoto University, Kyoto, JP;

Inventors:

Riena Jinno, Kyoto, JP;

Shizuo Fujita, Kyoto, JP;

Kentaro Kaneko, Kyoto, JP;

Tokiyoshi Matsuda, Kyoto, JP;

Takashi Shinohe, Kyoto, JP;

Toshimi Hitora, Kyoto, JP;

Assignees:

FLOSFIA INC., Kyoto, JP;

KYOTO UNIVERSITY, Kyoto, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 29/66 (2006.01); H01L 29/778 (2006.01); C30B 33/02 (2006.01); H01L 29/04 (2006.01); H01L 29/737 (2006.01); H01L 29/24 (2006.01); C23C 16/40 (2006.01); C23C 16/56 (2006.01); C30B 25/02 (2006.01); C30B 29/16 (2006.01); H01L 29/08 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02565 (2013.01); C23C 16/40 (2013.01); C23C 16/56 (2013.01); C30B 25/02 (2013.01); C30B 29/16 (2013.01); C30B 33/02 (2013.01); H01L 21/0242 (2013.01); H01L 21/0262 (2013.01); H01L 21/02414 (2013.01); H01L 21/02428 (2013.01); H01L 21/02483 (2013.01); H01L 21/02598 (2013.01); H01L 29/04 (2013.01); H01L 29/0891 (2013.01); H01L 29/24 (2013.01); H01L 29/66969 (2013.01); H01L 29/7371 (2013.01); H01L 29/7786 (2013.01); H01L 29/7787 (2013.01);
Abstract

In a first aspect of a present inventive subject matter, a semiconductor device includes a first semiconductor layer that is an electron-supply layer containing as a major component a first semiconductor crystal with a metastable crystal structure; and a second semiconductor layer that is an electron-transit layer containing as a major component a second semiconductor crystal with a hexagonal crystal structure. The first semiconductor crystal contained in the first semiconductor layer is different in composition from the second semiconductor crystal comprised in the second semiconductor layer.


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