The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2020
Filed:
Nov. 22, 2017
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Makonnen Payne, White Plains, NY (US);
Emanuel I. Cooper, Scarsdale, NY (US);
WonLae Kim, Gyeonggi-do, KR;
Eric Hong, Gyeonggi-do, KR;
Sean Kim, Gyeonggi-do, KR;
Assignee:
Entegris, Inc., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 7/32 (2006.01); C11D 3/33 (2006.01); C11D 7/36 (2006.01); C11D 3/00 (2006.01); G03F 7/42 (2006.01); C11D 11/00 (2006.01); C11D 1/62 (2006.01); C11D 3/06 (2006.01); C11D 3/20 (2006.01); C11D 3/28 (2006.01); C11D 3/39 (2006.01); C11D 3/43 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C11D 3/33 (2013.01); C11D 1/62 (2013.01); C11D 3/0073 (2013.01); C11D 3/06 (2013.01); C11D 3/2068 (2013.01); C11D 3/2082 (2013.01); C11D 3/28 (2013.01); C11D 3/3942 (2013.01); C11D 3/43 (2013.01); C11D 7/3209 (2013.01); C11D 7/36 (2013.01); C11D 11/0047 (2013.01); G03F 7/425 (2013.01); G03F 7/426 (2013.01); H01L 21/02068 (2013.01);
Abstract
The disclosure relates to a cleaning composition that aids in the removal of post-etch residues in the production of semiconductors. There is provided a stock composition comprising: a tetraalkylammonium hydroxide base or a quaternary trialkylalkanolamine base; a corrosion inhibitor; and a combination of at least two or more polyprotic acids or salts thereof, wherein at least one said polyprotic acid or salt thereof contains phosphorous.