The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2020
Filed:
Oct. 06, 2017
C. Uyemura & Co., Ltd., Osaka, JP;
Masayuki Utsumi, Osaka, JP;
Masahito Tanigawa, Osaka, JP;
C. UYEMURA & CO., LTD., Osaka, JP;
Abstract
A surface treating apparatus that suppresses occurrence of defects is provided. A treatment solution is accumulated in a tankthrough a treatment solution collecting port/air discharging portin a lower portion of a body. An air heated by the treatment solution flows toward an upper portion (portion without the treatment solution) of the tankvia the treatment solution collecting port/air discharging portin the lower portion of the body, and is discharged via an exhaust duct. In this way, the air that is heated and tends to flow upward in the bodyis discharged from the lower portion thereof and is replaced with an external air from the upper portion thereof. Accordingly, the air in the bodycan be maintained at a uniform temperature. Thus, the treatment solution that reaches a lower portion of a substratefrom an upper portion thereof can be maintained at a uniform temperature. The air is caused to flow toward the lower portion from the upper portion in the body, so that the substrateis pulled downward, and swinging of the substratecan thus be reduced. Therefore, the substratecan be less likely to contact an inletand an outlet