The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2020
Filed:
Apr. 05, 2018
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 11/02 (2006.01); H01L 21/67 (2006.01); A47L 11/18 (2006.01); B24B 29/00 (2006.01); G05D 3/20 (2006.01); G01C 1/00 (2006.01); B24B 37/34 (2012.01); B24B 7/22 (2006.01); B24B 27/00 (2006.01); B24B 53/017 (2012.01); B24B 37/10 (2012.01); B08B 11/00 (2006.01);
U.S. Cl.
CPC ...
A47L 11/18 (2013.01); B08B 11/00 (2013.01); B08B 11/02 (2013.01); B24B 7/228 (2013.01); B24B 27/0023 (2013.01); B24B 29/00 (2013.01); B24B 37/10 (2013.01); B24B 37/345 (2013.01); B24B 53/017 (2013.01); G01C 1/00 (2013.01); G05D 3/20 (2013.01); H01L 21/67046 (2013.01); H01L 21/67219 (2013.01); H01L 21/67253 (2013.01);
Abstract
Various examples of a substrate cleaning apparatus and a substrate processing apparatus are described in the present disclosure. One example of the present invention is a substrate cleaning apparatus including a roll cleaning member cleaning a substrate, an inclination sensor detecting an inclination of the roll cleaning member, and an output device outputting a detection result of the inclination sensor.