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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10574210 B1

PDFFull Text
Date of Patent:
Feb. 25, 2020

Filed:

Mar. 31, 2017

Baw devices having top electrode leads with reduced reflectance

Applicant:

Qorvo Us, Inc., Greensboro, NC (US);

Inventors:

Buu Quoc Diep, Murphy, TX (US);

Matthew L. Wasilik, Plano, TX (US);

Assignee:

Qorvo US, Inc., Greensboro, NC (US);

Attorney:

Withrow & Terranova, P.L.L.C.

Primary Examiner:

Thomas M Dougherty

Int. Cl.
CPC ...
H01L 41/053 (2006.01); H01L 41/047 (2006.01); H01L 41/09 (2006.01); H03H 9/54 (2006.01); H03H 3/02 (2006.01); H01L 41/107 (2006.01); H01L 41/29 (2013.01);
U.S. Cl.
CPC ...
H03H 9/54 (2013.01); H01L 41/047 (2013.01); H01L 41/107 (2013.01); H01L 41/29 (2013.01); H03H 3/02 (2013.01);
Abstract

The present disclosure relates to a Wafer-level-packaged Bulk Acoustic Wave (BAW) device, which includes a bottom electrode, a top electrode, a top electrode lead, a piezoelectric layer sandwiched between the bottom and the top electrodes, an enclosure, and an anti-reflective layer (ARL). Herein, an active region for a resonator is formed where the bottom electrode and the top electrode overlap. The top electrode lead is over the piezoelectric layer and extending from the top electrode. The enclosure includes a cap and an outer wall that extends from the cap toward the piezoelectric layer to form a cavity. The top electrode resides in the cavity and a first portion of the outer wall resides over the top electrode lead. The ARL, with a reflectance less than 40% R, is between the first portion of the outer wall and the top electrode lead.

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Diep, Buu. (2020). Baw devices having top electrode leads with reduced reflectance (U.S. Patent No. 10574210). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10574210

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